CREAM-TEA.DE

Adding pulses of CO to the cluster beam we have been able to study bare, saturated and intermediate Pt n CO m clusters. To my best knowledge these measurements represent the first PES(A) measurements of unsaturated Pt n anions. This technique allows us to study the evolution of the electronic structure from bare to saturated clusters... One possible cause for non-ideal ALD growth are insufficient cycle times which can result in an unsaturated surface coverage, at least at some positions of a microscopic structure. We have developed a Monte-Carlo transport simulation technique coupled to a feature scale simulator to investigate the time evolution of surface coverages during the ALD deposition step. For different precursor sticking coefficients and for structures with different aspect ratios we have calculated the minimal time required to reach complete surface saturation. Furthermore we have calculated the front of the grown film after several cycles. Our results clearly indicate that..