METROBOOST

MetroBoost provides calibration wafers and software products for overlay and critical dimension metrology in semiconductor manufacturing... Overlay Booster is a Windows-based software package featuring analysis models for ASML, Canon, Nikon and other exposure tools. The real-time license for unattended operation with IVS metrology tools is available from MetroBoost and also several IVS tool suppliers. MetroBoost also offers Overlay Booster as an off-line software package for data review and engineering analysis. Overlay Booster can import data files from several different metrology tools including overlay data files created by Applied Materials CD-SEM systems. As an optional feature, the product provides the capability to analyze the difference between two data files. Applications include stepper matching, etch-to-photo bias analysis for predictive lot disposition, indirect overlay to a third layer, and review of wafer-to-wafer variations in a lot.

Primary location: Santa Clara United States