MEAGLOW

Meaglow was founded in 2009, and has worked to develop new methodologies and equipment for semiconductor deposition. In 2012, Meaglow launched the first of its hollow cathode plasma sources, which have been instrumental in reducing oxygen contamination in nitride films for the ALD community resulting in some of the best layers grown to date. Interest in the plasma source has now grown to the point where Meaglow has been asked to supply whole ALD/ALE systems with its newest plasma source designs. The first such system has already been delivered... Meaglow has been selling its gas plasma sources to the semiconductor industry, replacing legacy sources that were less than optimum for current applications. The company has a unique set of designs that have greatly reduced oxygen contamination problems and provide a higher flux of active plasma species. Sales have been made to such high-level customers as the NASA Jet Propulsion Laboratories, U.S. Naval Research, and Lawrence Berkeley..

Also known as: Meaglow Ltd

Primary location: Ontario Canada