RESPONSE DYNAMICS VIBRATION ENGINEERING

In the semiconductor industry, at the R&D phase, we have used strain gages to help develop the cutting edge high-tech semiconductor equipment that is part of the effort to produce electrical components of ever diminishing size. As vibration consultants in the semiconductor industry for over 3 decades we have been involved in many unique projects where strain is of interest. In validating and trouble shooting a design we may use strain gage testing, in conjunction with our Vibration Testing Techniques, to deduce the force transmission paths, or to estimate vibration isolation effectiveness. In this area the strain gages have been used to determine the load acting on the vacuum chamber of a scanning electron microscope from a novel turbo-pump isolation system. Micro-vibration limits how small lines can be etched, or how well a tool can resolve an image. Design for mitigation of vibration is a major consideration... Response Dynamics has made Diagnostic Vibration Testing and Diagnostic..

Also known as: Response Dynamics, Response Dynamics Vibration Engineering, Inc.