WAFER CHARGING MONITORS

WCM's Evaluation Services provide the customer with CHARM®-2 wafer pre-conditioning, testing, data analysis, and summary reports which include wafer maps of wafer surface-substrate potentials, UV dose, and J-V Characteristics of the charging source. We will also show you how to use them to predict device damage... The re-usable CHARM®-2 monitor wafers offer fab engineers the ability to measure the charging characteristics of plasmas or ion beams before product wafers are exposed to them. Comparison of equipment charging "fingerprints" obtained during periods of reduced yield immediately identifies the offending equipment. Routine use of re-usable CHARM®-2 wafers as equipment monitors to detect equipment drift, or to optimize processes, can prevent costly problems before they occur... a company serving the semiconductor industry and equipment makers worldwide

Also known as: Wafer Charging Monitors, Inc.

Primary location: Woodside United States