METNEMS

Micro electromechanical systems (MEMS) are already well established in consumer products and industry demand for increased complexity, speed and performance is driving size reduction towards the nanoscale and Nano-Electro-Mechanical Systems (NEMS). NEMS is a new key disruptive technology providing potential solutions to industry to a range of technological barriers over a wide spread of sectors, from ICT through physical sensors to biological sensor applications. As the dimensions of devices and structures reduce, new technologies and approaches are required. These developments will both enable and demand innovative metrology, impacting strongly over a range of sectors. To date there has been almost no metrological activity to anticipate the impending metrological needs which exploitation of NEMS will produce... This project seeks to meet these challenges by focusing on developing novel high frequency, high performance nanoscale mechanical resonators and actuators, aimed at both..