EEPLASMA

ee plasma GmbH can supply you with leading-edge remote plasma sources for semiconductor front end and back end of line photo-resist ashing and isotropic etch needs... Our core business is to supply equipment manufacturers for semiconductor devices and MEMS with innovative, reliable and very service-friendly microwave plasma sources. Our remote plasma sources are the key elements of the equipment for photo resist removal, surface cleaning, as well as isotropic etch that are used in semiconductor- and MEMS production... The smart, efficient and service-friendly plasma source technology.<br />Ausrüster von innovativen, zuverlässigen, sehr effizienten und servicefreundlichen Mikrowellenplasmaquellen für die Halbleiter- und MEMS Produktion.

Also known as: eeplasma GmbH

VAT numbers: DE 283871674

Primary location: Taufkirchen