PILLARHALL

PillarHall® test chips enable easy, fast and accurate way to characterize thin film processes and to solve Ultra High Aspect Ratio nanometrology challenges. Typical use is thin film conformality measurements in atomic layer deposition and chemical vapor deposition processes... PillarHall® silicon wafers and chips enable easy analysis of thin film conformality using well-defined, record-demanding microscopic 3-D structures. Typical usage areas are atomic layer deposition and chemical vapor deposition R