SPECTROSCOPIC ELLIPSOMETERS

The FilmTek� 2000SE is an affordable spectroscopic ellipsometer for thin film characterization that measures from the deep UV to NIR (190-1700nm). Based on a rotating compensator design, the FilmTek� 2000SE spectroscopic ellipsometer combines spectroscopic ellipsometry with multiple angle reflectometry to make it ideally suited for measuring the thickness and optical constants (n & k) of very thin films. The FilmTek� 3000SE spectroscopic ellipsometer adds transmission measurement capability in addition to spectroscopic ellipsometry and DUV reflectometry. The FilmTek� 2000SE spectroscopic ellipsometer utilizes SCI's material modeling software to provide an affordable and reliable thin film measurement tool for the simultaneous measurement of film thickness, index of refraction, and extinction coefficient... SCI provides high resolution thin-film metrology systems to leading companies in the semiconductor, optoelectronics, data storage, display, MEMS, biotechnology,..