THIRD PARTY SENSORS

KLA's Sensarray wafer based sensor products are used to measure process conditions - in situ temperature or plasma characteristics. For more information, go to www.kla.com. Each KLA Sensarray wafer is made on a Silicon based substrate, with the electronic components integrated into the substrate and typically have a Silicon cover over the top. The KLA wafers store data on the wafer and are downloaded to a PC after the completion of the test.

Also known as: Third Party Sensors LLC

Primary location: Portland United States