ODAOPTICS - Key Persons

Job Titles:

• Chief Technical Officer
• Senior Project Leader at ASML

Mr. Sakin has more than thirty years progressive experience in Optical Design, Optical Engineering, Optical Manufacturing and Metrology, research and development, management and training. He holds more than 10 patents and published numerous papers in a field of Optical Engineering. As Chief Technical Officer at Optical Design Associates he is responsible for successful development and implementation of all projects including low and high end lithography machines, near and far infrared devices, ophthalmological systems, telescopical systems, and others. These responsibilities included technical development and oversee of all production and metrology stages. As Senior Project Leader at ASML, Mr. Sakin was leading a team of optical designers in both imaging and illumination optics, providing state-of-the-art optical system development. He had full responsibility for all aspects of optical design at ASML and was heavily involved in the Maskless Tool Project and Flat Panel Display Project. Prior to entering management, he was a leading optical designer of optical systems for all generations of Micrascan lithography machines and the X-ray lithography machine. In this role, his responsibilities have included: system engineering, (i.e., transforming the scenario into an appropriate set of optical system specifications), conceptual and detailed optical design, in-depth computer modeling of the optical system to support performance prediction, error budget derivation, flowdown and piece part tolerance allocation, assembly/test procedure development and implementation, acceptance test plan development, acting as interface between design engineers and assembly technicians, and development and presentation of all optical information to the customer from proposal through final design review. Optical systems and projects for which he has been the principal designer and consultant include: optical design and analysis of catadioptric Projection Optics systems for 248 nm, 193 nm and 157 nm step-and scan High NA lithographic machines null correctors designs for all generations of High NA step-and scan machines close cooperation with the optical manufacturing departments optical design of advanced checkerboard concept alignment system for the first generation of X-ray lithography machine optical design of catadioptric Projection Optics and Illumination system for Maskless lithography machine utilizing Spatial Light Modulator pattern generator two and four mirror optical designs of Projection Optics for 54" and 62" Flat Panel Display machines optical design of different magnifications High Speed IR lenses for wafer inspection microscope design of wide zoom range centering alignment collimator design of a variety of high contrast projection lenses for LCD High Intensity projectors large working distance zoom lens design for zoom projector 10x, 20x and 50x High Speed Telecentric Retrotelefocus Orthoscopic lenses for Optical Comparators design and development of high contrast and small distortion Scanning Laser Ophthalmoscope design and development of new generation of high resolution colonoscopy endoscopes design of complete line of plano-apochromatic objectives for biological microscopes design of variety of precise angular and linear measuring optical systems large field of view design of variety of optical magnifiers conceptual analysis and design of laser deep UV interferometers

Job Titles:

• President
• Design Department Director at SVGL - ASML